Browsing 2005 fascicula9 nr1 by Subject "Sputtering"

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    • Mechanical and Tribological Properties of TiCxOy Thin Films 

      Munteanu, Daniel; Borcea, Bogdan; Munteanu, Alexandru; Cozma, Rodica; Vaz, Filipe (Universitatea "Dunărea de Jos" din Galați, 2005)
      The main purpose of this work consists on the preparation of single layered titanium oxycarbide, TiCxOy, thin films, deposited by d.c. reactive magnetron sputtering. The depositions were carried out from a TiC solid ...