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dc.contributor.authorMunteanu, Daniel
dc.contributor.authorBorcea, Bogdan
dc.contributor.authorMunteanu, Alexandru
dc.contributor.authorCozma, Rodica
dc.contributor.authorVaz, Filipe
dc.date.accessioned2018-10-04T08:47:08Z
dc.date.available2018-10-04T08:47:08Z
dc.date.issued2005
dc.identifier.issn1453 – 083X
dc.identifier.urihttp://10.11.10.50/xmlui/handle/123456789/5454
dc.descriptionThe Annals of "Dunarea de Jos" University of Galati Fascicle IX Metallurgy and Materials Science ISSN 1453 – 083X NR 1 – 2005ro_RO
dc.description.abstractThe main purpose of this work consists on the preparation of single layered titanium oxycarbide, TiCxOy, thin films, deposited by d.c. reactive magnetron sputtering. The depositions were carried out from a TiC solid target, on (AISI M2) steel substrates at 200oC, under the variation of two process parameters, such us time deposition and flow rate of reactive gas O2. The O2 flow varied between 0.5 and 7.5 sccm and the deposition time between 3600 and 6000 s. In terms of film colours, the most interesting colour tones have been observed if the oxygen flow increased. Static friction coefficient, wear and residual stresses are characterized and discussed as a function of both process parameters (oxygen flow and time). The results reveled a good correlation between compressive residual stress level in the films and the oxygen flow. A compressive residual stress state has been observed if the O2 flow is bigger than 1 sccm. Generally, the addition of oxygen till 7.5 sccm leads to an increasing of this compressive stress level to -17.7 GPa. For an oxygen flow rate higher than 2 sccm and a high compressive residual stress level, the deposited films presented a good wear behaviour. However, the best wear results were registered for a moderate value of the residual stress (-1.18 GPa) and an oxygen flow rate of 2.5 sccm.ro_RO
dc.language.isoenro_RO
dc.publisherUniversitatea "Dunărea de Jos" din Galațiro_RO
dc.subjectSputteringro_RO
dc.subjectResidual stressro_RO
dc.subjectwearro_RO
dc.titleMechanical and Tribological Properties of TiCxOy Thin Filmsro_RO
dc.typeArticlero_RO


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