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Studies and Research on the Production of TiO2 and TiN thin Film by Assisted Physical Vapor Deposition Magnetron Process
(Universitatea "Dunărea de Jos" din Galați, 2017)
The experimental research carried out in this paper aims at obtaining thin
films of TiO2 and TiN and at characterizing them in terms of morphology, structure,
transparency and electrical properties. The films were obtained ...