Mechanical and Tribological Properties of TiCxOy Thin Films
Fecha
2005Autor
Munteanu, Daniel
Borcea, Bogdan
Munteanu, Alexandru
Cozma, Rodica
Vaz, Filipe
Metadatos
Mostrar el registro completo del ítemResumen
The main purpose of this work consists on the preparation of single layered
titanium oxycarbide, TiCxOy, thin films, deposited by d.c. reactive magnetron
sputtering. The depositions were carried out from a TiC solid target, on (AISI M2)
steel substrates at 200oC, under the variation of two process parameters, such us
time deposition and flow rate of reactive gas O2. The O2 flow varied between 0.5 and
7.5 sccm and the deposition time between 3600 and 6000 s. In terms of film colours,
the most interesting colour tones have been observed if the oxygen flow increased.
Static friction coefficient, wear and residual stresses are characterized and
discussed as a function of both process parameters (oxygen flow and time). The
results reveled a good correlation between compressive residual stress level in the
films and the oxygen flow. A compressive residual stress state has been observed if
the O2 flow is bigger than 1 sccm. Generally, the addition of oxygen till 7.5 sccm
leads to an increasing of this compressive stress level to -17.7 GPa. For an oxygen
flow rate higher than 2 sccm and a high compressive residual stress level, the
deposited films presented a good wear behaviour. However, the best wear results
were registered for a moderate value of the residual stress (-1.18 GPa) and an
oxygen flow rate of 2.5 sccm.
Colecciones
- 2005 fascicula9 nr1 [18]